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MEMS Gas Sensor of Resistive Type for Detection of Hydrogen Sulfide Down to Low Concentrations

I. M. Komarevtsev,A. S. Kondrateva,A. N. Kazakin, Ya. B. Enns, I. A. Lazdin,P. A. Karaseov, U. D. Akulshin

MATERIALS PHYSICS AND MECHANICS（2024）

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Key words
microelectromechanical system,nickel oxide,microelectromechanical resistive gas sensor,hydrogen sulfide
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