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In2O3–ZnO Superlattice Transistors by Atomic Layer Deposition with High Field-Effect Mobility

Ziheng Wang, Jinxiu Zhao,Kai Jiang,Yuan Li, Zhenyu Chen,Chen Wang,Guangzheng Yi, Kunlin Cai, Zhiyu Lin, Liankai Zheng,Tianning Cui,Xiuyan Li,Xueli Ma,Guilei Wang,Chao Zhao,Arokia Nathan,Jun Yu, Mengwei Si

IEEE Electron Device Letters（2025）

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Key words
Oxide semiconductors,superlattice,ALD
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