Overcoming Welding and Contact Degradation Failures Incurred by Complementary N/MEMS Logic Gate Structures Fabricated on SOI Wafers

Bennett Smith,Md Ataul Mamun,Benjamin Horstmann,Umit Ozgur,Vitaliy Avrutin

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS（2025）

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关键词

Relays,Logic gates,Nanoelectromechanical systems,Metallization,Logic,Micromechanical devices,Welding,Capacitance,Voltage control,Periodic structures,NEMS,MEMS,nanoactuators,relays,logic gates,optimization methods

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