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Using Oxide Interlayer As Passivation for Ti/n+-GaN Ohmic Contact to Achieve Lower Contact Resistivity

2024 21st China International Forum on Solid State Lighting & 2024 10th International Forum on Wide Bandgap Semiconductors (SSLCHINA IFWS)(2024)

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关键词
ohmic contact,interfacial oxide passivation,Fermi level pinning effect,selective-aera regrowth
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