Piezoelectric Thin Films and Their Applications in MEMS: A Review Jinpeng Liu,Hua Tan, Xinyi Zhou, Weigang Ma, Chuanmin Wang,Nguyen-Minh-An Tran, Wenlong Lu,Feng Chen, Junya Wang,Haibo ZhangJournal of Applied Physics(2025)引用 0|浏览1AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要