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Highly Sensitive Solar-Blind Ultraviolet Photodetectors and 64 X 64 Photodetector Arrays Realized by Molecule Beam Epitaxy Grown Ga2O3 Epitaxial Thin Films

Siliang Kuang, Zhenni Yang, Xiangyu Xu, Yaxin He,Lingjie Bao, Zheng Liang,Kuangkuang Li,Kang Ling,Xu Zhang,Ye Yang,Hao Long,Qijin Cheng,Xingzhao Liu,Duanyang Chen, Hongji Qi,Kelvin H. L. Zhang

ADVANCED OPTICAL MATERIALS（2025）

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Key words
Gallium Oxide,Molecular Beam Epitaxy,Solar-Blind Uv Photodetector,Wide Bandgap Semiconductor
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