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Investigation on Control of Middle and High-Spatial Frequency Errors of Fused Silica Optics Melt Polished by CO2 Lasers

Tianhao Zhang,Zhaoyang Yin,Linjie Zhao,Jian Cheng,Mingjun Chen, Tianyuan Li, Wei Liao,Xiaodong Yuan,Xiaolong Jiang

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY（2025）

引用 0|浏览9
关键词
Fused silica,Melt polishing,Frequency errors,Surface roughness,CO 2 laser
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