Method for Sensitivity Improvement of MEMS Pressure Sensor: Structural Design and Optimization of Concave Resonant Pressure Sensor

Senhui Chuai, Jieyao Deng, Haoran Li,Kai Chen,Hang Geng, Yifan Wang,Huiliang Cao

IEEE Sensors Journal（2025）

引用 0|浏览5

关键词

MEMS resonant pressure sensor,Frequency difference,Double resonator,Electrostatic drive

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