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A Skin-Inspired Optoelectromechanically Coupled System for 3-Axis Airflow Sensor

Xiaozhong Wu, Ziyu Zhang,Haonan Zhao,Yang Wang, Junjie Zhou, Deyu Meng, Yanle He, Min Liu,Yifei Zhang,Zhongying Xue,Chengming Jiang,Miao Zhang,Zengfeng Di,Yongfeng Mei,Qinglei Guo

NANO ENERGY（2025）

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Key words
Silicon nanomembrane,Airflow sensor,Skin-inspired electronics,Photodetectors,Optoelectromechanically coupled systems
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