Back-End-of-Line Compatible HfO $_{\text{2}}$ /zro $_{\text{2}}$ Superlattice Ferroelectric Capacitor with TiO $_{\text{2}}$ Seed Layer for Enhanced Ferroelectricity
IEEE Transactions on Electron Devices（2025）
Key words
Back end of line (BEOL),ferroelectric film,low thermal budget,superlattice,TiO $_{\text{2}}$ seed layer
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