Plasma Processes for Vertical Niobium Nitride Superconducting Through Silicon Vias
IEEE ELECTRON DEVICE LETTERS（2025）
关键词
Through-silicon vias,Superconducting transition temperature,Plasmas,Silicon,Films,Superconducting films,Plasma temperature,Fabrication,Etching,Temperature measurement,Deep silicon etch,through silicon via,atomic layer deposition,niobium nitride,superconducting
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要