Ultra-Wideband SH-SAW Filters Using 30° Y-cut LiNbO3/SiO2/Poly-Si/Si Multilayered Substrates
2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)（2024）
关键词
Acoustic resonators,ladder acoustic filter,large bandwidth,shear horizontal
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