Design and Implementation of a High-Sensitivity Inertial Cilium Combined Hydrophone for Low-Frequency Detection
IEEE SENSORS JOURNAL（2025）
Key words
Vectors,Vibrations,Micromechanical devices,Sensitivity,Accelerometers,Piezoresistance,Resonant frequency,Structural beams,Sensors,Acoustics,High sensitivity,low-frequency detection,microelectromechanical system (MEMS) piezoresistive accelerometer,PZT scalar hydrophone,resonant vector hydrophone
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