In Situ Pre-Metallization Cleaning of CoSi2 Contact-Hole Patterns with Optimized Etching Process
MICROMACHINES（2024）
关键词
Ar sputtering,plasma treatment,pre-metallization cleaning,plasma induce damage,contact hole cleaning
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要