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Optical Constants of TiN, Amorphous SiO2 and SiN in the Extreme Ultraviolet Range

Qais Saadeh,Vicky Philipsen,Johan Meersschaut, Venkat sunil kumar Channam, Karim-alexandros Kantre,Andrey Sokolov, Bettina Kupper, Thomas Wiesner, D. A. N. I. L. O. OCAnA Garcia,Zanyar Salami,Christian Buchholz,Frank Scholze,Victor Soltwisch

APPLIED OPTICS（2024）

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