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Performance Enhancement of MOCVD Grown Zn-doped /3-Ga2o3 Deep-Ultraviolet Photodetectors on Silicon Substrates Via TiN Buffer Layers

Anoop Kumar Singh, Jun-Hong Shen,Shiming Huang,Chao-Chun Yen,Hsin-Yu Chou, Wei-Hsiang Chiang,Bharath Kumar Yadlapalli,Chiung-Yi Huang,Po-Liu Liang,Ray-Hua Horng,Dong-Sing Wuu

APPLIED SURFACE SCIENCE（2025）

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关键词
Deep-ultraviolet photodetector,MOCVD,Silicon substrate,TiN buffer layer
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