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Microstructural and Mechanical Properties of TiN/CrN and TiSiN/CrN Multilayer Coatings Deposited in an Industrial-Scale HiPIMS System: Effect of the Si Incorporation

N. Sala,M. Rebelo de Figueiredo,R. Franz, C. Kainz,J. C. Sanchez-Lopez,T. C. Rojas, D. Fernandez de los Reyes,C. Colominas,M. D. Abad

SURFACE & COATINGS TECHNOLOGY（2024）

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关键词
Industrial HiPIMS deposition system,TiN/CrN,TiSiN/CrN,Multilayer coatings,Superlattice,Hardness
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