TCAD for Circuits and Systems: Process Emulation, Parasitics Extraction, Self-Heating

Zlatan Stanojevic,Xaver Klemenschits,Gerhard Rzepa,Ferdinand Mitterbauer,Christian Schleich,Franz Schanovsky,Oskar Baumgartner,Markus Karner

BiCMOS and Compound Semiconductor Integrated Circuits and Technology Symposium（2024）

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Parasite Extracts,Technology Computer-aided Design,Device Simulation,3D Structure,Nanosheets,Circuit Simulation,Compact Model,Transient Simulation,Drain Contacts,Doping Profile,SPICE Simulations

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