TiB1.8 Single Layers and Epitaxial TiB2-based Superlattices by Magnetron Sputtering Using a TiB (ti:B = 1:1) Target
SURFACE & COATINGS TECHNOLOGY（2024）
关键词
Titanium diboride,Superlattices,Stoichiometry,Magnetron sputter epitaxy
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要