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Study on the Effects of Precursor Concentration and Annealing Process of In2O3 Thin Films Prepared by Sol-gel Method

Tao Lin, Chaoyang Xie,Shuai Mi, Duo Liang, Haoxiang Huang,Jianan Xie, Jiaxing Wang, Jiale Dang, Shui Chen,Yantao Liu,Yupeng Duan

SEMICONDUCTORS（2024）

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关键词
Indium oxide,Sol–gel,Precursor concentration,XRD,Optical properties
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