Enhancement of PDE and Noise Characteristics by Trench Guide with 2×2 Small Lens Array and Backside Pixel Isolation for 7μm SPAD Pixel

Hanseung Lee,Jongchae Kim,Jaehyung Jang, Kyungsu Byun, Jongmin An, Sueon Hwang,Jaehyun Park,Hoonmoo Choi,Sunho Oh,Suhyun Yi, Yongtae Gim, Namil Kim, Pyongsu Kwag, Minkyu Kim, Sangyeong Lee, Jihee Han, Minsang Yu, Taejun Baek, Ahyoung Cho, Seunghyun Yoon, Sooyoung Park, Seokhyeon Kim, Kwangjun Cho,Kyung-Do Kim, Wonje Park,Juhyun Cho, Hoesam Jeong, Hoon-sang Oh,Changrock Song

2024 50TH IEEE EUROPEAN SOLID-STATE ELECTRONICS RESEARCH CONFERENCE, ESSERC 2024（2024）

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Key words

LiDAR,SPAD,PDE,TG,2x2 SLA,Crosstalk,BPI

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