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N2 Nanosheet Pathfinding-PDK (P-PDKTM) Including Back-Side PDN

Anita Farokhnejad,Siva Satyendra Sahoo,Dawit Abdi, Jack Cousins, Arka Dutta,Gioele Mirabelli,Venkateswarlu Sankatali,Lynn Verschueren, Sheng Yang,Odysseas Zografos,James Myers,Pieter Weckx,Marie Garcia Bardon,Geert Hellings,Julien Ryckaert

2024 50TH IEEE EUROPEAN SOLID-STATE ELECTRONICS RESEARCH CONFERENCE, ESSERC 2024（2024）

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Key words
Pathfinding PDK,Nanosheet,GAA,backside PDN
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