Strain Mapping and Simulation of Transistor Structures in a 22nm FDSOI Technology

Utess Dirk, Kleimaier Dominik Martin, Billan Etienne, Youssuf Tashfain,Zhao Zhixing, Nemec Thorgund,Meyer Moritz Andreas, Rinderknecht Jochen

BIO Web of Conferences（2024）

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Key words

strain,fdsoi,transistor,simulation,ped

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