Heterogeneous Integration of 42° YXLiNbO3/SiO2/Quartz for Wideband Andspurious-Free SAW Resonators
IEEE TRANSACTIONS ON ELECTRON DEVICES（2024）
关键词
piezoelectric heterogeneous substrate,shear horizontal mode,LiNbO(3)on quartz,piezoelectric heterogeneous substrate,surface acoustic wave (SAW) resonator,surface acoustic wave (SAW) resonator,spurious modesuppression,surface acoustic wave (SAW) resonator
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