Process Design for Improvement in Device Performance of Top-Gate Tfts Using In-Sn-Zn-O Channels Prepared by Thermal Atomic-Layer Deposition
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING（2025）
关键词
Thin-film transistor (TFT),In-Sn-Zn-O (ITZO),Atomic-layer deposition (ALD),Amorphous oxide semiconductor,Top-gate structure
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