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Parameter Optimization of Semiconductor Gas Sensor under AC Impedance Measurement

Jifeng Chu, Zhuoli Deng,Jianbin Pan,Aijun Yang,Qiongyuan Wang,Hongye Yuan,Huan Yuan, Feng Xin,Mingzhe Rong,Xiaohua Wang

ACS SENSORS（2024）

Cited 0|Views5
Key words
impedance measurements,gas sensor,SF6 decomposition products,parameter optimization,drift correction,linearity improvement
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