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Improvement of the Contact Resistance and Subthreshold Swing of the (001) C-H Diamond MOSFETs with Heavily Boron Doped Layer

Ryosuke Yamamoto, Kento Narita,Kosuke Ota,Nobutaka Oi,Atsushi Hiraiwa, Tatsuya Fujishima,Hiroshi Kawarada

Extended Abstracts of the 2024 International Conference on Solid State Devices and Materials(2024)

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