谷歌浏览器插件
订阅小程序
在清言上使用

Tungsten Carbide Hard Mask Performance in Supervia and High Aspect Ratio Patterning for BEOL Advanced Interconnects

Daniel Montero, Philippe Marien,Yannick Hermans, Fulya Ulu Okudur, Mattia Pasquali,Syamashree Roy,Chen Wu, Nunzio Buccheri,Victor Vega-Gonzalez,Harinarayanan Puliyalil, Quyang Lin, Gilberto Casillas,Jef Geypen,Alfonso Sepulveda,Frederic Lazzarino,Seongho Park,Zsolt Tokei

Extended Abstracts of the 2024 International Conference on Solid State Devices and Materials(2024)

引用 0|浏览11
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要