Vertically Integrated Self-Monitoring AlGaN-Based Deep Ultraviolet Micro-LED Array with Photodetector Via a Transparent Sapphire Substrate Toward Stable and Compact Maskless Photolithography Application
LASER & PHOTONICS REVIEWS（2024）
关键词
gallium nitride,maskless photolithography,DUV micro-LED,monolithic integration,photodetector
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要