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Cathode Etching Phenomenon of High Beam-Anode Ion Source and Its Elimination Measures

Shi-Yi Tang, Zi-Qi Ma, Yun-Xiao Zou,Xiao-Kai An, Dong-Jie Yang,Liang-Liang Liu,Sui-Han Cui,Zhong-Zhen Wu

ACTA PHYSICA SINICA(2024)

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Key words
large beam-anode layer ion source,cathode etching,electromagnetic shielding,output properties
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