Growth and Thickness Effect of <100>-Oriented Ternary 0.06Pb(mn1/3nb2/3)o3-0.94Pb(zr0.48ti0.52)o3 Ferroelectric Thin Films on Silicon Substrate by RF Sputtering
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY（2025）
关键词
Ferroelectric,Piezoelectric,Thin film,PMN-PZT
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