MEMS Fabry-Perot Sensor for Accurate High Pressure Measurement Up to 10 MPaYuqiang Hu,Lu Cao,Shaoxiong Nie,Qihui Liu, Fei Xie,Xiao Peng, Yaochen Zhu, Jiachen Han, Xin Chen,Lihao Wang,Yichen Liu,Tongyu Liu,Hao Chen,Zhenyu WuOptics express（2024）引用 0|浏览6AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
