A New Process for Laser-Induced Gas Debonding Based on the Grid Scanning Method

Huijuan Liu, Jieyuan Zhang, Chenghao Ma,Fangcheng Wang,Qiang Liu,Guoping Zhang

2024 25TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY, ICEPT（2024）

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laser induced gas,laser debonding,temporary bonding,grid scanning

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