Influence of the Edge Effect of the Solenoid Magnetic Field on the Discharge Process of Magnetron Sputtering in Long and Narrow Chambers

Pengcheng Wang,Bangle Zhu, Jiaming Liu,Yigang Wang,Xiaoyang Sun,Shunming Liu, Biao Tan, Tao Huang,Haiyi Dong,Sihui Wang,Yong Wang

JOURNAL OF INSTRUMENTATION（2024）

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Instrumentation for particle accelerators and storage rings - high energy (linear accelerators, synchrotrons),Instrumentation for synchrotron radiation accelerators,Nuclear instruments and methods for hot plasma diagnostics,Plasma generation (laser-produced, RF, x ray-produced)

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