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Ultrasonic-assisted Stripping of Single-Crystal SiC after Laser Modification

Boyang Lv,Linzheng Ye,Xijing Zhu,Yao Liu,Shida Chuai, Zexiao Wang

CERAMICS INTERNATIONAL（2024）

Cited 0|Views2
Key words
Ultrasonic-assisted stripping,Single-crystal SiC,Ultrasonic cavitation,Laser modification,Wafer manufacturing,Crack extension
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