Development of Ion-Beam Sputtered Silicon Nitride Thin Films for Low-Noise Mirror Coatings of Gravitational-Wave Detectors
A. Amato,M. Bazzan,G. Cagnoli,M. Canepa, M. Coulon,J. Degallaix,N. Demos,A. Di Michele, M. Evans,F. Fabrizi,G. Favaro, D. Forest,S. Gras,D. Hofman,A. Lemaitre, G. Maggioni,M. Magnozzi,V. Martinez,L. Mereni,C. Michel, V. Milotti,M. Montani,A. Paolone,A. Pereira,F. Piergiovanni,V. Pierro,L. Pinard,I. M. Pinto,E. Placidi, S. Samandari,B. Sassolas,N. Shcheblanov,J. Teillon, I. Vickridge,M. Granata arxiv（2024）
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