Crack-free > 1-Μm AlN Layer on Si Substrate Using Ductile Interlayer for Strain Modification in Epitaxial FilmMuhammad Aqib,Mina Moradnia,Mihee Ji, Vijay S. Parameshwaran,Wendy L. Sarney,Sara Pouladi,Nam-In Kim, Rheno Paul Rajesh Kumar,Gregory A. Garrett,Anand V. Sampath,Rebecca L. Forrest,Jae-Hyun RyouAPPLIED PHYSICS LETTERS(2024)引用 0|浏览2AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要