Inverse Design of Digital Mode (de)multiplexer with Large Fabrication Tolerance Using the Modified Adjoint Method
2024 Conference on Lasers and Electro-Optics (CLEO)（2024）
关键词
Digital Modulation,Fabrication Tolerance,Inverse Design,Large Fabrication Tolerance,Insertion Loss,Digital Technologies,Inductively Coupled Plasma,Dielectric Constant,Device Performance,Waveguide,Electron Beam Lithography,Hole Diameter,Inverted Regions
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