Characterization of Passivation Layer Losses Using On-Chip Chalcogenide Glass Resonators with Ultra-high Q-factor in the Mid-infrared Region
2024 Conference on Lasers and Electro-Optics (CLEO)（2024）
关键词
Passivation Layer,Chalcogenide Glasses,On-chip Resonators,Thin Films,Surface Chemistry,Hydrophilic Surface,Atomic Layer Deposition,Absorption Loss,Quantum Electrodynamics,Molecular Spectroscopy,Nanometer Thickness,mid-IR Region,Inorganic Precursors,Cavity Quantum Electrodynamics
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