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Analysis of Individual Collision Cascade Parameters During Irradiation of Ga2O3 by Atomic and Molecular Ions

A. I. Struchkov,K. V. Karabeshkin,P. A. Karaseov,A. I. Titov

SEMICONDUCTORS（2024）

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Key words
Gallium oxide,β-Ga2O3 ion irradiation,defect engineering,collision cascade density
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