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Demonstration of SiC-on-Insulator Substrate with Smart Cut™ Technology for Photonic Applications

Stéphanie Huet,Sylvain Guerber,Emmanuel Rolland,Bertrand Szelag, Guillaume Gelineau,Alexandre Moulin,Vladimir S. Prudkovskiy, Nicolas Troutot,Christophe Licitra,Patrice Gergaud,Sophie Barbet, Mathieu Delcroix, Simon Caridroit, Vincent Amalbert,Carlos Alonso-Ramos,Daniele Melati,Samson Edmond,Laurent Vivien,Karine Mony,Gérard Lapertot,Julie Widiez

Materials Science Forum（2024）

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