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Multiscale Fabrication and Characterization of a NEMS Force Sensor

Masoud Jedari Ghourichaei, Umut Kerimzade, Levent Demirkazik,Bartosz Pruchnik,Krzysztof Kwoka,Dominik Badura,Tomasz Piasecki,Alp Timucin Toymus,Onur Aydin,Bekir Aksoy,Cemal Aydogan, Gokhan Nadar,Ivo W. Rangelow,Levent Beker,Arda Deniz Yalcinkaya,Halil Bayraktar,Teodor Gotszalk,Burhanettin Erdem Alaca

ADVANCED MATERIALS TECHNOLOGIES（2024）

Cited 0|Views8
Key words
dynamic response,flow sensing,force sensor,gauge factor,microfabrication,silicon nanowire
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