Demonstration of On-Chip Switched-Capacitor DC-DC Converters Using BEOL Compatible Oxide Power Transistors and Superlattice MIM Capacitors
IEEE TRANSACTIONS ON ELECTRON DEVICES（2024）
Key words
Amorphous oxide semiconductor (AOS),back-end-of-line (BEOL),dc-dc converters,superlattice laminate,switched-capacitor (SC) circuit
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