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First Demonstration of Fully Integrated 16 Nm Half-Pitch Selector Only Memory (SOM) for Emerging CXL Memory

Myoungsub Kim, Yooncheol Bae, Jaehyuk Park, Jeongho Yeon, Hyungjoon Shim, Sehyun Jin, Hyunsoo Kim, Sangchul Oh, Gapsok Do, Dongyeol Yun,Hyung Dong Lee, David Ahn, Junghun Lee, Muhui Park, Junghyuk Yoon, Jeongho Yi,Taekseung Kim, Gain Park,Seoungju Chung,Junho Cheon,Sujin Chae, Namkyun Park, Kyunghoon Kim,Dongyean Oh,Jaeyun Yi,Seonyong Cha

Symposium on VLSI Technology（2024）

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Key words
selector only memory (SOM),16 nm,reliability
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