A 336 X 240 Backside-Illuminated 3D-Stacked 7μm SPAD for LiDAR Sensor with PDE 28% at 940nm and under 0.4% Depth Accuracy Up to 10M

Jaehyung Jang,Jongchae Kim,Sunho Oh, Kyungsu Byun,Dahwan Park, Jihee Han, Hanseung Lee,Suhyun Yi,Hoonmoo Choi, Jongeun Kim, Namil Kim, Yongtae Gim, Minkyu Kim, Sangyoung Lee, Hansang Kim, Eunchang Lee, Minsang Yu, Jeongjoon Hwang, Seunghyun Yoon, Kwang Hwangbo, Heesang Kim, Ahyoung Cho, Taejun Baek, Sooyoung Park, Kwangjun Cho, Wonje Park,Kyung-Do Kim, Hoesam Jeong,Hoon Sang Oh,Changrock Song

Symposium on VLSI Technology（2024）

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Key words

SPAD,PDE,Trench guide,SLA,LiDAR,ToF

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