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In-Situ Deposited Anti-Aging TiN Capping Layer for Nb Superconducting Quantum Circuits

Hao-Ran Tao,Lei Du,Liang-Liang Guo, Yong Chen,Hai-Feng Zhang,Xiao-Yan Yang, Guo-Liang Xu, Chi Zhang,Zhi-Long Jia,Peng Duan,Guo-Ping Guo

Chinese Physics B（2024）

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Key words
anti-aging,oxidation,dielectric loss,Nb superconducting quantum circuits
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