Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Synthesis of Titanium Dioxide Thin Films Via Thermo- and Plasma-Enhanced Atomic Layer Deposition

M. G. Ambartsumov,O. M. Chapura,V. A. Tarala

APPLIED SURFACE SCIENCE（2024）

Cited 0|Views6
Key words
Titanium dioxide,Thin films,Thermo- and plasma enhanced atomic layer deposition,Self-limited regime,Microstructure,Morphology
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined