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Double Etch Method for the Fabrication of Nanophotonic Devices from Van Der Waals Materials

Otto Cranwell Schaeper,Lesley Spencer,Dominic Scognamiglio,Waleed El-Sayed,Benjamin Whitefield,Jake Horder, Nathan Coste,Paul Barclay,Milos Toth, Anastasiia Zalogina,Igor Aharonovich

ACS PHOTONICS（2024）

Cited 0|Views6
Key words
hexagonal boron nitride,van der Waals materials,fabrication
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