Complex Diagnostics of Silicon-on-Insulator Layers after Ion Implantation and Annealing

P. A. Yunin,M. N. Drozdov,A. V. Novikov,V. B. Shmagin,E. V. Demidov,A. N. Mikhailov,D. I. Tetelbaum,A. I. Belov

Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques（2024）

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关键词

ion implantation,silicon-on-insulator,amorphization,doping,secondary ion mass spectrometry,X-ray diffractometry,small-angle X-ray reflectometry,thermal annealing,recrystallization,doping,pre-amorphization

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