Establishing On-Wafer Calibration Standards for the 16-Term Error Model: Application to Silicon High-Frequency Transistor Characterization
IEEE Journal of Microwaves（2024）
关键词
RF probes,on-wafer measurement,S-parameters,mmW,< named-content xmlns:xlink=& quot,http://www.w3.org/1999/xlink & quot,xmlns:ali=& quot,http://www.niso.org/schemas/ali/1.0/& quot,xmlns:mml=& quot,http://www.w3.org/1998/Math/MathML & quot,xmlns:xsi=& quot,http://www.w3.org/2001/XMLSchema-instance & quot,content-type=& quot,math & quot,xlink:type=& quot,simple & quot,> < inline-formula > < tex-math notation=& quot,LaTeX & quot,>$\rm{f}_{\rm{MAX}}$</tex-math > </inline-formula > </named-content > determination,f(MAX )determination,RF inductors,RF MOSFET,TRL calibration,SOLT calibration,16 error-terms calibration,< named-content xmlns:xlink=& quot,http://www.w3.org/1999/xlink & quot,xmlns:ali=& quot,http://www.niso.org/schemas/ali/1.0/& quot,xmlns:mml=& quot,http://www.w3.org/1998/Math/MathML & quot,xmlns:xsi=& quot,http://www.w3.org/2001/XMLSchema-instance & quot,content-type=& quot,math & quot,xlink:type=& quot,simple & quot,> < inline-formula > < tex-math notation=& quot,LaTeX & quot,>$\rm{f}_{\rm{MAX}}$</tex-math > </inline-formula > </named-content > determination,RF inductors,RF MOSFET,TRL calibration,SOLT calibration,16 error-terms calibration
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